FTS Corporation "New Facing Targets Sputtering equipment maker"

Facing targets sputtering

 FTS Corporation is a vacuum equipment maker specialized in New Facing Targets Sputtering (NFTS) technology. Our NFTS technology enable customers to produce high quality thin films for their own applications at low temperature and low plasma damage on the substrate surface. This is because NFTS plasma source strongly confines the sputtering plasma in the space between the facing targets. As a result, the substrate surface is rarely bombarded from the sputtering plasma.

 We have developed NFTS plasma sources for wide area coating with stable sputtering plasma and high utilization of target material. Consequently, we can respond to a variety of customer needs from the basic research to the mass-production. NFTS technology can solve a variety of previously existing issues many customers have faced. Furthermore, we envisage that our NFTS technology will become core infrastructure for customers as they create high performance products in thin film applications.





▲ Picture of NFTS sputtering plasma

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 ◆ Thin films coating on plastic films
  ・ Compact NFTS web-coater equipment needless cooling drum.
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 ◆ Thin film coating on organic materials
  ・ Low damage and low temperature deposition on organic material.
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 ◆ Multilayer optical thin films
  ・ Formation of superior interface between thin films.
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 ◆ Passivation films
  ・ Formation of closely packed oxide or nitride thin films at high rate.
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 ◆ Semiconductor device
  ・ Formation of high quality thin films with superior step coverage.
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 ◆ Magnetic thin films
  ・ High rate deposition of magnetic films with flexibility.
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 ◆ Superconductivity thin films
  ・ Formation of superior crystal structure thin films at low temperature.
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 ◆ MEMS device
  ・ Metal or alloy films deposition at high rate and low temperature.
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plastic film coating

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